Radiation-Stimulated Transformation of the Reflectance Spectra of Diazoquinone–Novolac Photoresist Films Implanted with Antimony Ions
Crossref DOI link: https://doi.org/10.1134/S1027451020030283
Published Online: 2020-07-07
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kharchenko, A. A.
Brinkevich, D. I.
Prosolovich, V. S.
Brinkevich, S. D.
Odzaev, V. B.
Yankovski, Yu. N.
Text and Data Mining valid from 2020-05-01
Version of Record valid from 2020-05-01
Article History
Received: 12 September 2019
Revised: 22 November 2019
Accepted: 25 November 2019
First Online: 7 July 2020