Angular Dependences of Silicon Sputtering by Gallium Focused Ion Beam
Crossref DOI link: https://doi.org/10.1134/S1027451020040229
Published Online: 2020-08-25
Published Print: 2020-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bachurin, V. I.
Zhuravlev, I. V.
Pukhov, D. E.
Rudy, A. S.
Simakin, S. G.
Smirnova, M. A.
Churilov, A. B.
Text and Data Mining valid from 2020-07-01
Version of Record valid from 2020-07-01
Article History
Received: 11 January 2020
Revised: 14 February 2020
Accepted: 17 February 2020
First Online: 25 August 2020