Miniature Forming Lens for a High-Voltage Electron-Beam Lithography System
Crossref DOI link: https://doi.org/10.1134/S1027451020060336
Published Online: 2020-12-28
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kazmiruk, V. V.
Kurganov, I. G.
Savitskaya, T. N.
Text and Data Mining valid from 2020-11-01
Version of Record valid from 2020-11-01
Article History
Received: 18 February 2020
Revised: 12 March 2020
Accepted: 17 April 2020
First Online: 28 December 2020