Fast Nondestructive Technique for Analyzing Deflection of Membranes Located on the Substrate
Crossref DOI link: https://doi.org/10.1134/S1061830920050046
Published Online: 2020-08-03
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dedkova, A. A.
Dyuzhev, N. A.
Gusev, E. E.
Shtern, M. Yu.
Text and Data Mining valid from 2020-05-01
Version of Record valid from 2020-05-01
Article History
Received: 8 October 2019
Revised: 19 February 2020
Accepted: 13 March 2020
First Online: 3 August 2020