Manufacturing technology of intra- and interchip interconnects for modern ULSIs: Review and concepts of development
Crossref DOI link: https://doi.org/10.1134/S1063739715030087
Published Online: 2015-05-07
Published Print: 2015-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Valeev, A. S.
Krasnikov, G. Ya.
Text and Data Mining valid from 2015-05-01