The Use of Finite Element Modeling for Calculating the C-V Curve of Capacitor Mems Microphone
Crossref DOI link: https://doi.org/10.1134/S1063739717060075
Published Online: 2018-02-06
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grigor’ev, D. M.
Godovitsyn, I. V.
Amelichev, V. V.
Generalov, S. S.
Polomoshnov, S. A.
Text and Data Mining valid from 2017-11-01
Article History
Received: 28 April 2017
First Online: 6 February 2018