Parameters of Plasma and Kinetics of Active Particles in CF4 (CHF3) + Ar Mixtures of a Variable Initial Composition
Crossref DOI link: https://doi.org/10.1134/S1063739718060033
Published Online: 2019-03-13
Published Print: 2018-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Efremov, A. M.
Murin, D. B.
Kwon, K.-H.
Text and Data Mining valid from 2018-11-01
Article History
Received: 25 June 2018
First Online: 13 March 2019