Studying the Regimes of Silicon Surface Profiling by Focused Ion Beams
Crossref DOI link: https://doi.org/10.1134/S1063739719020057
Published Online: 2019-05-14
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kots, I. N.
Kolomiitsev, A. S.
Lisitsyn, S. A.
Polyakova, V. V.
Klimin, V. S.
Ageev, O. A.
Text and Data Mining valid from 2019-03-01
Version of Record valid from 2019-03-01
Article History
Received: 23 October 2018
First Online: 14 May 2019