Features of the Kinetics of Bulk and Heterogeneous Processes in CHF3 + Ar and C4F8 + Ar Plasma Mixtures
Crossref DOI link: https://doi.org/10.1134/S1063739719020070
Published Online: 2019-05-14
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Murin, D. B.
Efremov, A. M.
Kwon, K.-H.
Text and Data Mining valid from 2019-03-01
Version of Record valid from 2019-03-01
Article History
Received: 3 July 2018
First Online: 14 May 2019