Features of the Application of Reactive Ion Etching of Quartz in the Production of Pendulums of Q-Flex Accelerometers
Crossref DOI link: https://doi.org/10.1134/S1063739720020055
Published Online: 2020-05-18
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kharlamov, M. S.
Guseva, O. S.
Konovalov, S. F.
Text and Data Mining valid from 2020-05-01
Version of Record valid from 2020-05-01
Article History
Received: 9 July 2019
Revised: 10 October 2019
Accepted: 18 October 2019
First Online: 18 May 2020