Thermal Atomic Layer Deposition of TiNx Using TiCl4 and N2H4
Crossref DOI link: https://doi.org/10.1134/S1063739720050029
Published Online: 2021-01-27
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Abdulagatov, A. I.
Rabadanov, M. Kh.
Abdulagatov, I. M.
Text and Data Mining valid from 2020-11-01
Version of Record valid from 2020-11-01
Article History
Received: 13 December 2019
Revised: 20 January 2020
Accepted: 11 February 2020
First Online: 27 January 2021