The ALD Films of Al2O3, SiNx, and SiON as Passivation Coatings in AlGaN/GaN HEMT
Crossref DOI link: https://doi.org/10.1134/S106373972008003X
Published Online: 2021-02-08
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Enisherlova, K. L.
Temper, E. M.
Kolkovsky, Yu. V.
Medvedev, B. K.
Kapilin, S. A.
Text and Data Mining valid from 2020-12-01
Version of Record valid from 2020-12-01
Article History
Received: 5 January 2020
Revised: 13 January 2020
Accepted: 13 January 2020
First Online: 8 February 2021