Kinetics of the Volumetric and Heterogeneous Processes in the Plasma of a C4F8 + O2 + Ar Mixture
Crossref DOI link: https://doi.org/10.1134/S1063739721010054
Published Online: 2021-02-19
Published Print: 2021-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Efremov, A. M.
Murin, D. B.
Sobolev, A. M.
Kwon, K.-H.
Text and Data Mining valid from 2021-01-01
Version of Record valid from 2021-01-01
Article History
Received: 25 March 2020
Revised: 15 April 2020
Accepted: 10 July 2020
First Online: 19 February 2021