Numerical Simulation of Cryogenic Etching: Model with Delayed Desorption
Crossref DOI link: https://doi.org/10.1134/S106373972101008X
Published Online: 2021-02-19
Published Print: 2021-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rudenko, M. K.
Myakon’kikh, A. V.
Lukichev, V. F.
Text and Data Mining valid from 2021-01-01
Version of Record valid from 2021-01-01
Article History
Received: 13 August 2020
Revised: 13 August 2020
Accepted: 13 August 2020
First Online: 19 February 2021