Transformation of the Spectra of a Attenuated Total Reflection when Drying a Diazoquinone-Novolach Photoresist
Crossref DOI link: https://doi.org/10.1134/S106373972104003X
Published Online: 2021-07-17
Published Print: 2021-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Brinkevich, D. I.
Brinkevich, S. D.
Petlitsky, A. N.
Prosolovich, V. S.
Text and Data Mining valid from 2021-07-01
Version of Record valid from 2021-07-01
Article History
Received: 30 November 2020
Revised: 16 December 2020
Accepted: 29 December 2020
First Online: 17 July 2021