Investigation of the Effect of the Short-Term Exposure of Oxygen and Hydrogen Plasma on the Composition and Structure of Thin Tin Dioxide Films
Crossref DOI link: https://doi.org/10.1134/S1063739721080126
Published Online: 2022-01-27
Published Print: 2021-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tompakova, N. M. http://orcid.org/0000-0003-1881-2886
Polisan, A. A. http://orcid.org/0000-0002-1226-0382
Text and Data Mining valid from 2021-12-01
Version of Record valid from 2021-12-01
Article History
Received: 14 June 2021
First Online: 27 January 2022