On the Mechanisms Regulating the Plasma Composition and Kinetics of Heterogeneous Processes in a CF4 + CHF3 + Ar Mixture
Crossref DOI link: https://doi.org/10.1134/S1063739722050055
Published Online: 2022-09-08
Published Print: 2022-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Efremov, A. M.
Betelin, V. B.
Kwon, K.-H.
Text and Data Mining valid from 2022-09-08
Version of Record valid from 2022-09-08
Article History
Received: 15 March 2022
Revised: 12 May 2022
Accepted: 12 May 2022
First Online: 8 September 2022
CONFLICT OF INEREST
: The authors declare that they have no conflicts of interest.