Specific Features of Distribution and Relaxation of Elastic Stresses in Homoepitaxial CVD Films of Germanium and Diamond
Crossref DOI link: https://doi.org/10.1134/S1063774519030222
Published Online: 2019-06-07
Published Print: 2019-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Prokhorov, I. A.
Voloshin, A. E.
Romanov, D. A.
Bolshakov, A. P.
Ralchenko, V. G.
Text and Data Mining valid from 2019-05-01
Version of Record valid from 2019-05-01
Article History
Received: 29 May 2018
Revised: 29 May 2018
Accepted: 31 May 2018
First Online: 7 June 2019