In Situ Reflection Electron Microscopy for the Analysis of Silicon Surface Processes: Sublimation, Electromigration, and Adsorption of Impurity Atoms
Crossref DOI link: https://doi.org/10.1134/S1063774521040192
Published Online: 2021-07-23
Published Print: 2021-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rogilo, D. I.
Sitnikov, S. V.
Rodyakina, E. E.
Petrov, A. S.
Ponomarev, S. A.
Sheglov, D. V.
Fedina, L. I.
Latyshev, A. V.
Text and Data Mining valid from 2021-07-01
Version of Record valid from 2021-07-01
Article History
Received: 28 May 2020
Revised: 28 May 2020
Accepted: 15 June 2020
First Online: 23 July 2021