Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source
Crossref DOI link: https://doi.org/10.1134/S1063780X18090088
Published Online: 2018-09-19
Published Print: 2018-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nekliudova, P. A.
Kralkina, E. A.
Vavilin, K. V.
Zadiriyev, I. I.
Nikonov, A. M.
Text and Data Mining valid from 2018-09-01
Article History
Received: 29 May 2017
First Online: 19 September 2018