Plasma-Enhanced Chemical Vapor Deposition of Silicon Films at Low Pressure in GEC Reference Cell
Crossref DOI link: https://doi.org/10.1134/S1063780X20060094
Published Online: 2020-06-25
Published Print: 2020-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Siari, K.
Rebiai, S.
Bahouh, H.
Bouanaka, F.
Text and Data Mining valid from 2020-06-01
Version of Record valid from 2020-06-01
Article History
Received: 11 May 2019
Revised: 22 September 2019
Accepted: 19 December 2019
First Online: 25 June 2020