Features of Electromagnetic Field Excitation in a Capacitive HF Discharge. I. General Aspects. A Simple Model of Symmetric Discharge
Crossref DOI link: https://doi.org/10.1134/S1063780X20120028
Published Online: 2020-12-15
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dvinin, S. A.
Sinkevich, O. A.
Kodirzoda, Z. A.
Solikhov, D. K.
Text and Data Mining valid from 2020-12-01
Version of Record valid from 2020-12-01
Article History
Received: 10 February 2020
Revised: 12 May 2020
Accepted: 20 June 2020
First Online: 15 December 2020