Specificities of Electromagnetic Field Excitation in a Capacitive HF Discharge. III. Symmetric Discharge Partially Filling the Discharge Chamber
Crossref DOI link: https://doi.org/10.1134/S1063780X2102001X
Published Online: 2021-03-23
Published Print: 2021-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dvinin, S. A.
Sinkevich, O. A.
Kodirzoda, Z. A.
Solikhov, D. K.
Text and Data Mining valid from 2021-03-01
Version of Record valid from 2021-03-01
Article History
Received: 16 February 2020
Revised: 20 May 2020
Accepted: 20 June 2020
First Online: 23 March 2021