Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow
Crossref DOI link: https://doi.org/10.1134/S1063780X23601694
Published Online: 2024-04-16
Published Print: 2024-01
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Shemakhin, A. Yu.
Text and Data Mining valid from 2024-01-01
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Article History
Received: 19 May 2023
Revised: 10 October 2023
Accepted: 18 October 2023
First Online: 16 April 2024
CONFLICT OF INTEREST
: The author of this work declares that he has no conflicts of interest.