Defect formation and recrystallization mechanisms in silicon-on-sapphire films under ion irradiation
Crossref DOI link: https://doi.org/10.1134/S1063782614040265
Published Online: 2014-04-17
Published Print: 2014-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shemukhin, A. A.
Balakshin, Y. V.
Chernysh, V. S.
Golubkov, S. A.
Egorov, N. N.
Sidorov, A. I.
Text and Data Mining valid from 2014-04-01