Specific features of doping with antimony during the ion-beam crystallization of silicon
Crossref DOI link: https://doi.org/10.1134/S1063782616040199
Published Online: 2016-05-15
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pashchenko, A. S.
Chebotarev, S. N.
Lunin, L. S.
Irkha, V. A.
Text and Data Mining valid from 2016-04-01