Influence of the doping type and level on the morphology of porous Si formed by galvanic etching
Crossref DOI link: https://doi.org/10.1134/S1063782617020178
Published Online: 2017-02-10
Published Print: 2017-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pyatilova, O. V.
Gavrilov, S. A.
Shilyaeva, Yu. I.
Pavlov, A. A.
Shaman, Yu. P.
Dudin, A. A.
License valid from 2017-02-01