Effect of the Sapphire-Nitridation Level and Nucleation-Layer Enrichment with Aluminum on the Structural Properties of AlN Layers
Crossref DOI link: https://doi.org/10.1134/S1063782618060143
Published Online: 2018-05-15
Published Print: 2018-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Malin, T. V.
Milakhin, D. S.
Mansurov, V. G.
Galitsyn, Yu. G.
Kozhuhov, A. S.
Ratnikov, V. V.
Smirnov, A. N.
Davydov, V. Yu.
Zhuravlev, K. S.
Text and Data Mining valid from 2018-05-15
Article History
Received: 4 April 2017
Accepted: 10 April 2017
First Online: 15 May 2018