Processing of GaN/Si(111) Epitaxial Structures for MEMS Applications
Crossref DOI link: https://doi.org/10.1134/S1063782618160297
Published Online: 2019-02-26
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shubina, K. Yu.
Berezovskaya, T. N.
Mokhov, D. V.
Morozov, I. A.
Kotlyar, K. P.
Mizerov, A. M.
Nikitina, E. V.
Bouravleuv, A. D.
Text and Data Mining valid from 2018-12-01
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First Online: 26 February 2019