Anodic Oxidation of Hydrogen-Transferred Silicon-on-Insulator Layers
Crossref DOI link: https://doi.org/10.1134/S1063782619020246
Published Online: 2019-04-23
Published Print: 2019-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tyschenko, I. E.
Popov, I. V.
Spesivtsev, E. V.
Text and Data Mining valid from 2019-02-01
Article History
Received: 14 May 2018
Accepted: 21 May 2018
First Online: 23 April 2019