Influence of the Metallization Composition and Annealing Process Parameters on the Resistance of Ohmic Contacts to n-type 6H-SiC
Crossref DOI link: https://doi.org/10.1134/S1063782619150053
Published Online: 2020-01-09
Published Print: 2019-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Egorkin, V. I.
Zemlyakov, V. E.
Nezhentsev, A. V.
Gudkov, V. A.
Garmash, V. I.
Text and Data Mining valid from 2019-12-01
Version of Record valid from 2019-12-01
Article History
Received: 23 March 2018
Revised: 28 June 2018
Accepted: 25 September 2018
First Online: 9 January 2020