Initial Stages of Growth of Semipolar AlN on a Nanopatterned Si(100) Substrate
Crossref DOI link: https://doi.org/10.1134/S1063782621100043
Published Online: 2022-02-14
Published Print: 2021-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bessolov, V. N.
Konenkova, E. V.
Orlova, T. A.
Rodin, S. N.
Text and Data Mining valid from 2021-10-01
Version of Record valid from 2021-10-01
Article History
Received: 12 April 2021
Revised: 19 April 2021
Accepted: 19 April 2021
First Online: 14 February 2022