Structure and composition of silicon carbide films synthesized by ion implantation
Crossref DOI link: https://doi.org/10.1134/S1063783414110237
Published Online: 2014-11-06
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nussupov, K. Kh.
Beisenkhanov, N. B.
Zharikov, S. K.
Beisembetov, I. K.
Kenzhaliev, B. K.
Akhmetov, T. K.
Seitov, B. Zh.
Text and Data Mining valid from 2014-11-01