Optical monitoring of the deposition process of ferroelectric films
Crossref DOI link: https://doi.org/10.1134/S1063783415070021
Published Online: 2015-07-07
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Afanas’ev, M. S.
Nabiev, A. E.
Chucheva, G. V.
Text and Data Mining valid from 2015-07-01