Epitaxial growth of zinc oxide by the method of atomic layer deposition on SiC/Si substrates
Crossref DOI link: https://doi.org/10.1134/S1063783416070246
Published Online: 2016-07-26
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kukushkin, S. A.
Osipov, A. V.
Romanychev, A. I.
License valid from 2016-07-01