Study of Elastic Properties of SiC Films Synthesized on Si Substrates by the Method of Atomic Substitution
Crossref DOI link: https://doi.org/10.1134/S106378341912014X
Published Online: 2020-02-21
Published Print: 2019-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grashchenko, A. S.
Kukushkin, S. A.
Osipov, A. V.
Text and Data Mining valid from 2019-12-01
Version of Record valid from 2019-12-01
Article History
Received: 16 July 2019
Revised: 16 July 2019
Accepted: 25 July 2019
First Online: 21 February 2020
CONFLICT OF INTEREST
: We have no conflicts of interest to declare.