Dependence of Texture Tilt and Excitation Efficiency of Shear Waves for ZnO Films on Working Gas Pressure in a DC Magnetron System
Crossref DOI link: https://doi.org/10.1134/S1063784219050256
Published Online: 2019-06-13
Published Print: 2019-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Veselov, A. G.
Elmanov, V. I.
Kiryasova, O. A.
Nikulin, Yu. V.
Text and Data Mining valid from 2019-05-01
Version of Record valid from 2019-05-01
Article History
Received: 23 July 2018
Revised: 23 July 2018
Accepted: 28 November 2018
First Online: 13 June 2019