Structural properties of the epitaxial (SiC)1 − x (AlN) x solid solution films fabricated by magnetron sputtering of SiC-Al composite targets
Crossref DOI link: https://doi.org/10.1134/S1063785014040099
Published Online: 2014-05-14
Published Print: 2014-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ramazanov, Sh. M.
Kurbanov, M. K.
Safaraliev, G. K.
Bilalov, B. A.
Kargin, N. I.
Gusev, A. S.
Text and Data Mining valid from 2014-04-01