Nanoindentation and deformation properties of nanoscale silicon carbide films on silicon substrate
Crossref DOI link: https://doi.org/10.1134/S1063785014120268
Published Online: 2015-01-09
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grashchenko, A. S.
Kukushkin, S. A.
Osipov, A. V.
Text and Data Mining valid from 2014-12-01