Properties of contact coatings based on ruthenium nanofilms for MEMS switches
Crossref DOI link: https://doi.org/10.1134/S1063785015070226
Published Online: 2015-08-02
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Karabanov, S. M.
Verlov, N. A.
Suvorov, D. V.
Gololobov, G. P.
Slivkin, E. V.
Text and Data Mining valid from 2015-07-01