A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects
Crossref DOI link: https://doi.org/10.1134/S1063785017060050
Published Online: 2017-07-14
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Budnikov, N. S.
Dudenkova, V. V.
Kotomina, V. E.
Morozov, O. A.
Semenov, V. V.
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