Formation of hexagonal 9R silicon polytype by ion implantation
Crossref DOI link: https://doi.org/10.1134/S1063785017080211
Published Online: 2017-09-03
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Korolev, D. S.
Nikolskaya, A. A.
Krivulin, N. O.
Belov, A. I.
Mikhaylov, A. N.
Pavlov, D. A.
Tetelbaum, D. I.
Sobolev, N. A.
Kumar, M.
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