Creating Lithographic Pictures Using Faceted Zinc Oxide Microparticles on a Silicon Substrate
Crossref DOI link: https://doi.org/10.1134/S1063785018080047
Published Online: 2018-09-05
Published Print: 2018-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bobkov, A. A.
Pronin, I. A.
Moshnikov, V. A.
Yakushova, N. D.
Karmanov, A. A.
Averin, I. A.
Somov, P. A.
Terukov, E. I.
Text and Data Mining valid from 2018-08-01
Article History
Received: 7 March 2018
First Online: 5 September 2018