Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode
Crossref DOI link: https://doi.org/10.1134/S1063785021050254
Published Online: 2021-12-15
Published Print: 2021-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Men’shakov, A. I.
Emlin, D. R.
Text and Data Mining valid from 2021-07-01
Version of Record valid from 2021-07-01
Article History
Received: 7 December 2020
Revised: 7 December 2020
Accepted: 22 February 2021
First Online: 15 December 2021
CONFLICT OF INTEREST
: The authors declare that they have no conflicts of interest.