Study of Spatial Distribution of Piezoelectric Properties of ZnO Films by Acoustic Resonator Spectroscopy
Crossref DOI link: https://doi.org/10.1134/S1064226920110017
Published Online: 2020-11-26
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Alekseev, S. G.
Luzanov, V. A.
Polzikova, N. I.
Text and Data Mining valid from 2020-11-01
Version of Record valid from 2020-11-01
Article History
Received: 12 June 2020
Revised: 12 June 2020
Accepted: 20 June 2020
First Online: 26 November 2020