Investigation of the Depth and Rate of Ion Etching of QWIP Structures
Crossref DOI link: https://doi.org/10.1134/S1064226921030190
Published Online: 2021-04-13
Published Print: 2021-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Trukhachev, A. V.
Sednev, M. V.
Trukhacheva, N. S.
Boltar, K. O.
Dirochka, A. I.
Text and Data Mining valid from 2021-03-01
Version of Record valid from 2021-03-01
Article History
Received: 11 November 2019
Revised: 28 November 2019
Accepted: 10 December 2019
First Online: 13 April 2021