Gas-dynamic and thermal processes in the synthesis of trichlorosilane by hydrogen reduction of silicon tetrachloride in a high-frequency discharge
Crossref DOI link: https://doi.org/10.1134/S1070427214090092
Published Online: 2014-12-30
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kornev, R. A.
Shaposhnikov, V. A.
Kuz’min, A. M.
Text and Data Mining valid from 2014-09-01