Films based on phases in a Si–C–N system. Part II. plasma chemical synthesis of SiC x N y :Н films from the mixture of bis(trimethylsilyl)ethylamine and hydrogen
Crossref DOI link: https://doi.org/10.1134/S1087659617010126
Published Online: 2017-02-16
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rumyantsev, Yu. M.
Yushina, I. V.
Kosinova, M. L.
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