Study of chemical bonds and element composition of silicon oxycarbonitride films by the methods of XP-, IR-, and energy-dispersive spectroscopy
Crossref DOI link: https://doi.org/10.1134/S1087659617050042
Published Online: 2017-10-13
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fainer, N. I.
Plekhanov, A. G.
Asanov, I. P.
License valid from 2017-09-01
