On the Role of Supercritical Water in Laser-Induced Backside Wet Etching of Glass
Crossref DOI link: https://doi.org/10.1134/S1990793117070181
Published Online: 2018-03-07
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tsvetkov, M. Yu.
Yusupov, V. I.
Timashev, P. S.
Golant, K. M.
Minaev, N. V.
Tsypina, S. I.
Bagratashvili, V. N.
Text and Data Mining valid from 2017-12-01
Article History
Received: 3 April 2016
First Online: 7 March 2018